Inventor
ABDUL AZIZ KHAJA
Inventor
US
Overview
Patents· 23 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps23%
H01LSemiconductor devices20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
C23CCoating metallic material17%
B08BCleaning in general4%
H02NElectric machines not otherwise provided for4%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling3%
F02BInternal-combustion piston engines1%
F02DControlling combustion engines1%
F16CShafts1%
PatentTitleYear
12,575,382Methods and mechanisms for adjusting chucking voltage during substrate manufacturing202612,539,530Throttle valve and foreline cleaning using a microwave source202612,488,981Systems and methods for deposition residue control202512,400,843Chamber configurations and processes for particle control202512,347,653Uniform in situ cleaning and deposition202512,334,384Methods and apparatus for minimizing substrate backside damage202512,234,549Method of in situ ceramic coating deposition202512,217,937Radio frequency source for inductively coupled and capacitively coupled plasmas in substrate processing chambers202512,211,728Electrostatic chuck design with improved chucking and arcing performance202511,948,790Heater support kit for bevel etch chamber202411,894,228Treatments for controlling deposition defects202411,875,969Process chamber with reduced plasma arc202411,756,819Methods and apparatus for minimizing substrate backside damage202311,742,185Uniform in situ cleaning and deposition202311,699,577Treatment for high-temperature cleans202311,682,574Electrostatic chuck design with improved chucking and arcing performance202311,674,222Method of in situ ceramic coating deposition202311,670,492Chamber configurations and processes for particle control202311,613,808Clean processes for boron carbon film deposition202311,569,072RF grounding configuration for pedestals202311,560,623Methods of reducing chamber residues202311,515,150Hardmask tuning by electrode adjustment202211,299,805Plasma corrision resistive heater for high temperature processing2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to APPLIED MATERIALS INC (23)· patent assignee history
2022–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 23 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 23 | 2022–2026 |