Inventor
HAKYONG KWON
Inventor
KR
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material21%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
H01LSemiconductor devices18%
G01MTesting static or dynamic balance of machines or structures9%
G01NInvestigating or analysing materials by determining their chemical or physical properties9%
H01JElectric discharge tubes or discharge lamps9%
H05HPlasma technique6%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
H10BElectronic memory devices3%
PatentTitleYear
12,195,855Gas-phase reactor system including a gas detector202511,866,823Substrate supporting unit and a substrate processing device including the same202411,814,728Method for filling a gap in a three-dimensional structure on a semiconductor substrate202311,499,226Substrate supporting unit and a substrate processing device including the same202211,453,946Gas-phase reactor system including a gas detector202211,345,999Method of using a gas-phase reactor system including analyzing exhausted gas202211,251,040Cyclical deposition method including treatment step and apparatus for same2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to ASM IP HOLDING BV (7)· patent assignee history
2022–2025Based in KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASM IP HOLDING BV | 7 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| KR | 7 | 2022–2025 |