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Inventor

Terutaka Yamaoka

Inventor
Koshi, JP

Overview

1→
Patents
2018
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
9,978,619Substrate processing apparatus, substrate processing method and storage medium2018

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2018Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
2018Based in Koshi, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD12018
Locations
LocationPatentsSpan
Koshi, JP12018