Inventor
Vladimir Machavariani
Inventor
Rishon Lezion, IL
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Bprimary
G01BMeasuring length, thickness or similar linear dimensions24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light14%
G01NInvestigating or analysing materials by determining their chemical or physical properties14%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices10%
B24BMachines, devices, or processes for grinding or polishing3%
G01LMeasuring force, stress, torque, work, mechanical power, mechanical efficiency, or fluid pressure3%
G06TImage data processing or generation, in general3%
H01JElectric discharge tubes or discharge lamps3%
H01LSemiconductor devices3%
PatentTitleYear
10,916,404TEM-based metrology method and system202110,761,036Method and system for optical metrology in patterned structures202010,564,106Raman spectroscopy based measurements in patterned structures202010,274,435Method and system for optical metrology in patterned structures20197,187,456'Method and apparatus for measurements of patterned structures'20077,123,366'Method and apparatus for measurements of patterned structures'20066,885,446'Method and system for monitoring a process of material removal from the surface of a patterned structure'20056,836,324'Method and apparatus for measurements of patterned structures'20046,654,108'Test structure for metal CMP process control'20036,476,920'Method and apparatus for measurements of patterned structures'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2021Patents assigned to NOVA MEASURING INSTR LTD (10)· patent assignee history
2002–2021Based in Rishon Lezion, IL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NOVA MEASURING INSTR LTD | 10 | 2002–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Rishon Lezion, IL | 10 | 2002–2021 |