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Inventor

Atsunobu Une

Inventor
Kanagawa, JP

Overview

3→
Patents
1987–1993
Patent span
Physics
Primary field (CPC G)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
G12BConstructional details of instruments, or comparable details of other apparatus, not otherwise provided for25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
5,241,183'Vertical XY stage'19935,000,573'Method of alignment with the use of diffraction gratings and an apparatus therefor'19914,656,347'Diffraction grating position adjuster using a grating and a reflector'1987

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1987–1993Patents assigned to NIPPON TELEGRAPH & TELEPHONE (3)· patent assignee history
1987–1993Based in Kanagawa, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
NIPPON TELEGRAPH & TELEPHONE31987–1993
Locations
LocationPatentsSpan
Kanagawa, JP31987–1993