Inventor
MASAHIDE TADOKORO
Inventor
JP
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices15%
H01LSemiconductor devices15%
G01BMeasuring length, thickness or similar linear dimensions9%
G01NInvestigating or analysing materials by determining their chemical or physical properties9%
B05CApparatus for applying fluent materials to surfaces, in general6%
B05DProcesses for applying fluent materials to surfaces, in general6%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light6%
B05BSpraying apparatus3%
G06TImage data processing or generation, in general3%
PatentTitleYear
12,467,742Film thickness analysis method, film thickness analysis device and storage medium202512,228,390Information processing apparatus, information processing method and computer-readable recording medium202512,123,778Thermal imaging sensor for integration into track system202412,051,587Substrate processing apparatus, estimation method of substrate processing and recording medium202411,809,091Substrate processing apparatus and processing condition adjustment method202311,703,459System and method to calibrate a plurality of wafer inspection system (WIS) modules202311,637,031Systems and methods for spin process video analysis during substrate processing202311,474,028Systems and methods for monitoring one or more characteristics of a substrate2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to TOKYO ELECTRON LTD (8)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 8 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 8 | 2022–2025 |