Inventor
Liwan Yue
Inventor
Shanghai, CN
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices26%
H05GX-ray technique22%
G02BOptical elements, systems or apparatus11%
G01BMeasuring length, thickness or similar linear dimensions7%
B25JManipulators4%
G06TImage data processing or generation, in general4%
G21KHandling of particles or ionising radiation not otherwise provided for4%
H01LSemiconductor devices4%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light4%
H04NPictorial communication, e.g. television4%
PatentTitleYear
10,613,307Integrated rotary structure and fabrication method thereof202010,553,470Wafer alignment method and apparatus for overlay measurement202010,187,964Calibrating apparatus and method201910,042,269Apparatus and method for overlay measurement20189,992,857Light source and photolithography apparatus containing the same, calibrating apparatus and method20189,927,601'Extreme ultraviolet light source, exposure apparatus, and integrated rotary structure fabricating method'20189,835,956Apparatus and method for overlay measurement20179,706,632'EUV light source and exposure apparatus'20179,332,626'EUV light source and exposure apparatus'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016Patents assigned to SEMICONDUCTOR MFG INT SHANGHAI (1)· patent assignee history
2016–2020Based in Shanghai, CN· patent location history
2017–2020Patents assigned to SEMICONDUCTOR MFG INT SHANGHAI CORP (7)· patent assignee history
2017Patents assigned to SEMICONDUCTOR MFG INTERNATIONAL (SHANGHAI) CORPORATION (1)· patent assignee history
2020Patents assigned to SEMICONDUCTOR MFG INT BEIJING CORP (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SEMICONDUCTOR MFG INT SHANGHAI CORP | 7 | 2017–2020 |
| SEMICONDUCTOR MFG INT BEIJING CORP | 1 | 2020 |
| SEMICONDUCTOR MFG INT SHANGHAI | 1 | 2016 |
| SEMICONDUCTOR MFG INTERNATIONAL (SHANGHAI) CORPORATION | 1 | 2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Shanghai, CN | 9 | 2016–2020 |