Inventor
Robert J. Hollingsworth
Inventor
Austin, TX, US
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
G21KHandling of particles or ionising radiation not otherwise provided for33%
H01JElectric discharge tubes or discharge lamps33%
PatentTitleYear
10,748,734Multi-cathode EUV and soft x-ray source2020Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2020Patents assigned to EATON MARK F (1)· patent assignee history
2020Patents assigned to HOLLINGSWORTH ROBERT J (1)· patent assignee history
2020Patents assigned to STELLARRAY INC (1)· patent assignee history
2020Based in Austin, TX, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EATON MARK F | 1 | 2020 |
| HOLLINGSWORTH ROBERT Jself | 1 | 2020 |
| STELLARRAY INC | 1 | 2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Austin, Texas, US | 1 | 2020 |