Inventor
NAMKYUN KIM
Inventor
KR
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps31%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling8%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light8%
G01NInvestigating or analysing materials by determining their chemical or physical properties8%
G01RMeasuring electric variables8%
H01QAntennas, i.e. radio aerials8%
H02NElectric machines not otherwise provided for8%
H05HPlasma technique8%
PatentTitleYear
12,476,089Plasma processing apparatus202512,424,412Apparatus for providing RF power and operating method thereof202512,222,362Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing wafer202512,183,555Substrate processing apparatus and method of manufacturing semiconductor device using the same202411,996,275Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereof2024Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2024–2025Patents assigned to SAMSUNG ELECTRONICS CO LTD (5)· patent assignee history
2024–2025Based in KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 5 | 2024–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| KR | 5 | 2024–2025 |