Inventor
Bruno M. La Fontaine
Inventor
Pleasanton, CA, US
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices52%
B82YSpecific uses or applications of nanostructures13%
G01NInvestigating or analysing materials by determining their chemical or physical properties9%
H05GX-ray technique9%
G02BOptical elements, systems or apparatus4%
G02FOptical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein4%
G21KHandling of particles or ionising radiation not otherwise provided for4%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h104%
PatentTitleYear
10,185,234Harsh environment optical element protection20199,557,650'Transport system for an extreme ultraviolet light source'20179,560,730'Transport system for an extreme ultraviolet light source'20178,642,474'Spacer lithography'20147,101,645'Reflective mask for short wavelength lithography'20066,872,497'Reflective mask for short wavelength lithography'20056,710,853'Phase grating focus monitor using overlay technique'20046,645,679'Attenuated phase shift mask for use in EUV lithography and a method of making such a mask'20036,608,321'Differential wavelength inspection system'20036,603,543'Inspection system with enhanced contrast'20036,555,274'Pupil filtering for a lithographic tool'20036,556,286'Inspection system for the pupil of a lithographic tool'20036,535,280'Phase-shift-moir focus monitor'20035,498,923'Fluoresence imaging'1996Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1996Patents assigned to AT & T CORP (1)· patent assignee history
1996Based in East Quogue, NY, US· patent location history
2003–2014Patents assigned to ADVANCED MICRO DEVICES INC (8)· patent assignee history
2003–2014Based in Pleasanton, CA, US· patent location history
2014Patents assigned to DENG YUNFEI (1)· patent assignee history
2017–2019Patents assigned to ASML NETHERLANDS BV (3)· patent assignee history
2017–2019Based in San Diego, CA, US· patent location history
2019Patents assigned to CYMER INC (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ADVANCED MICRO DEVICES INC | 8 | 2003–2014 |
| ASML NETHERLANDS BV | 3 | 2017–2019 |
| AT & T CORP | 1 | 1996 |
| CYMER INC | 1 | 2019 |
| DENG YUNFEI | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Pleasanton, California, US | 10 | 2003–2014 |
| San Diego, California, US | 3 | 2017–2019 |
| East Quogue, New York, US | 1 | 1996 |