Inventor
YONGSUN KO
Inventor
KR
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices43%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1043%
B08BCleaning in general14%
PatentTitleYear
11,527,399Wafer cleaning apparatus based on light irradiation and wafer cleaning system including the same202211,342,203Substrate cleaning apparatus and substrate cleaning method using the same202211,302,526Supercritical drying apparatus and method of drying substrate using the same2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022Patents assigned to SAMSUNG ELECTRONICS CO LTD (3)· patent assignee history
2022Based in KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 3 | 2022 |
Locations
| Location | Patents | Span |
|---|---|---|
| KR | 3 | 2022 |