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Inventor

Jisoo Suh

Inventor
Miyagi, JP

Overview

4→
Patents
2018–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps25%
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H02NElectric machines not otherwise provided for13%
H05HPlasma technique13%
PatentTitleYear
10,825,709Electrostatic chucking method and substrate processing apparatus202010,755,902Plasma processing apparatus and focus ring202010,269,607Electrostatic chucking method and substrate processing apparatus201910,103,011Plasma processing method and plasma processing apparatus2018

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2018–2020Patents assigned to TOKYO ELECTRON LTD (4)· patent assignee history
2018Based in Hwaseong-si, KR· patent location history
2019–2020Based in Miyagi, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD42018–2020
Locations
LocationPatentsSpan
Miyagi, JP32019–2020
Hwaseong-si, KR12018