LexDanaLexDanabeta
Inventor

EUN SEOK SEO

Inventor
KR

Overview

1→
Patents
2026
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B05Cprimary
B05CApparatus for applying fluent materials to surfaces, in general20%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices20%
H01LSemiconductor devices20%
H05BElectric heating20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
PatentTitleYear
12,568,790Substrate processing apparatus and method of manufacturing semiconductor device using the same2026

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2026Patents assigned to SAMSUNG ELECTRONICS CO LTD (1)· patent assignee history
2026Based in KR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SAMSUNG ELECTRONICS CO LTD12026
Locations
LocationPatentsSpan
KR12026