Inventor
Thibault Simon Mathieu Laurent
Inventor
Eindhoven, NL
Overview
Patents· 32 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices45%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
H01LSemiconductor devices17%
G01KMeasuring temperature4%
H05BElectric heating3%
Y10TTechnical subjects covered by former us classification3%
G01BMeasuring length, thickness or similar linear dimensions1%
PatentTitleYear
RE048668Temperature sensing probe, burl plate, lithographic apparatus and method202110,788,763Lithographic apparatus202010,747,126Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method202010,705,426Extraction body for lithographic apparatus202010,591,828Lithographic apparatus and method202010,551,752Lithographic apparatus and method202010,520,837Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method201910,508,896Measurement substrate and a measurement method201910,495,985Lithographic apparatus and device manufacturing method201910,481,502Object holder and lithographic apparatus201910,324,382Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method201910,203,611Lithographic apparatus and method201910,191,377Lithographic apparatus and a device manufacturing method201910,114,295Lithographic apparatus and device manufacturing method20189,971,252Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method20189,971,254Sensor, lithographic apparatus and device manufacturing method20189,939,738Lithographic apparatus and an object positioning system20189,915,877'Object holder and lithographic apparatus'20189,904,177'Fluid handling structure, a lithographic apparatus and a device manufacturing method'20189,897,928'Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method'20189,823,589'Lithographic apparatus and method'20179,785,055'Object holder and lithographic apparatus'20179,753,382'Sensor, lithographic apparatus and device manufacturing method'20179,740,110'Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method'20179,632,435'Lithographic apparatus and method'20179,618,858'Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table'20179,575,419'Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method'20179,513,568'Lithographic apparatus'20169,298,107'Lithographic apparatus and method'20169,280,063'Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method'20169,141,005'Temperature sensing probe, burl plate, lithographic apparatus and method'20158,970,822'Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2021Patents assigned to ASML NETHERLANDS BV (32)· patent assignee history
2015–2020Patents assigned to LAURENT THIBAULT SIMON MATHIEU (9)· patent assignee history
2015–2020Patents assigned to KUNNEN JOHAN GERTRUDIS CORNELIS (8)· patent assignee history
2015–2021Based in Eindhoven, NL· patent location history
2016–2020Patents assigned to JACOBS JOHANNES HENRICUS WILHELMUS (5)· patent assignee history
2016–2018Patents assigned to BLOKS RUUD HENDRIKUS MARTINUS JOHANNES (4)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 32 | 2015–2021 |
| LAURENT THIBAULT SIMON MATHIEUself | 9 | 2015–2020 |
| KUNNEN JOHAN GERTRUDIS CORNELIS | 8 | 2015–2020 |
| JACOBS JOHANNES HENRICUS WILHELMUS | 5 | 2016–2020 |
| BLOKS RUUD HENDRIKUS MARTINUS JOHANNES | 4 | 2016–2018 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eindhoven, NL | 32 | 2015–2021 |