Inventor
Robert Eder
Inventor
Karlsruhe, DE
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G02Bprimary
G02BOptical elements, systems or apparatus24%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H01HElectric switches14%
Y10TTechnical subjects covered by former us classification10%
F16DCouplings for transmitting rotation5%
PatentTitleYear
9,977,338Projection objective for a microlithographic projection exposure apparatus20189,588,445'Projection objective for a microlithographic projection exposure apparatus'20179,280,058'Projection objective for a microlithographic projection exposure apparatus'20168,902,407'Projection objective for a microlithographic projection exposure apparatus'20148,064,041'Projection objective for a microlithographic projection exposure apparatus'20114,892,982'Timing mechanism with improved clutch assembly'19904,796,484'Shaft detent assembly for a timing mechanism'19894,611,103'Means providing intermittent motion to a cam means of a timing mechanism and having sub-interval switching means'1986Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1986–1990Patents assigned to EMHART IND (3)· patent assignee history
1986Based in Indianapolis, IN, US· patent location history
1989–1990Based in Speedway, IN, US· patent location history
2011–2018Patents assigned to ZEISS CARL SMT GMBH (5)· patent assignee history
2011–2014Patents assigned to EDER ROBERT (2)· patent assignee history
2011–2014Patents assigned to WABRA NORBERT (2)· patent assignee history
2011–2018Based in Karlsruhe, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL SMT GMBH | 5 | 2011–2018 |
| EMHART IND | 3 | 1986–1990 |
| EDER ROBERTself | 2 | 2011–2014 |
| WABRA NORBERT | 2 | 2011–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Karlsruhe, DE | 5 | 2011–2018 |
| Speedway, IN, US | 2 | 1989–1990 |
| Indianapolis, IN, US | 1 | 1986 |