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Inventor

Robertus Victorius Maria Scheepens

Inventor
's-Hertogenbosch, NL

Overview

1→
Patents
2008
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
7,420,676'Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus'2008

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2008Patents assigned to ASML NETHERLANDS BV (1)· patent assignee history
2008Based in 's-Hertogenbosch, NL· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML NETHERLANDS BV12008
Locations
LocationPatentsSpan
's-Hertogenbosch, NL12008