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Inventor

SEONGBO SHIM

Inventor
KR

Overview

2→
Patents
2023–2024
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices67%
G02BOptical elements, systems or apparatus33%
PatentTitleYear
11,960,212Extreme ultraviolet lithography device and method of operating extreme ultraviolet lithography device202411,762,277EUV photomask2023

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2023–2024Patents assigned to SAMSUNG ELECTRONICS CO LTD (2)· patent assignee history
2023–2024Based in KR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SAMSUNG ELECTRONICS CO LTD22023–2024
Locations
LocationPatentsSpan
KR22023–2024