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Inventor

Takayoshi Osakaya

Inventor
Kodaira, JP

Overview

1→
Patents
1981
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
4,298,273'Projection aligner and method of positioning a wafer'1981

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1981Patents assigned to HITACHI LTD (1)· patent assignee history
1981Based in Kodaira, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI LTD11981
Locations
LocationPatentsSpan
Kodaira, JP11981