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Inventor

Hironobu Yabuta

Inventor
Himeji, JP

Overview

5→
Patents
2008–2017
Patent span
Electricity
Primary field (CPC H)

Patents· 5 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices28%
H05GX-ray technique28%
B82YSpecific uses or applications of nanostructures11%
H01JElectric discharge tubes or discharge lamps11%
F21VFunctional features or details of lighting devices or systems thereof6%
G02BOptical elements, systems or apparatus6%
G21KHandling of particles or ionising radiation not otherwise provided for6%
H05HPlasma technique6%
PatentTitleYear
9,599,812'Foil trap and light source device using such foil trap'20179,572,240'Light source apparatus'20177,705,334'Extreme ultraviolet radiation source device'20107,479,645'Device for producing extreme UV radiation'20097,459,708'Extreme UV radiation source device and method for eliminating debris which forms within the device'2008

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2008–2017Patents assigned to USHIO ELECTRIC INC (5)· patent assignee history
2008–2009Based in Himeji, JP· patent location history
2010Based in Shizuoka, JP· patent location history
2017Based in Gotenba, JP· patent location history
2017Based in Tokyo, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
USHIO ELECTRIC INC52008–2017
Locations
LocationPatentsSpan
Himeji, JP22008–2009
Gotenba, JP12017
Tokyo, JP12017
Shizuoka, JP12010