Inventor
Shih-Haur Shen
Inventor
Sunnyvale, CA, US
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
H01LSemiconductor devices22%
B65BMachines, apparatus or devices for, or methods of, packaging articles or materials4%
G06FElectric digital data processing4%
G01BMeasuring length, thickness or similar linear dimensions2%
G01NInvestigating or analysing materials by determining their chemical or physical properties2%
PatentTitleYear
10,589,397Endpoint control of multiple substrate zones of varying thickness in chemical mechanical polishing202010,562,148Real time profile control for chemical mechanical polishing202010,556,315Determination of gain for eddy current sensor202010,427,272Endpoint detection with compensation for filtering201910,391,610Core configuration for in-situ electromagnetic induction monitoring system201910,350,723Overpolishing based on electromagnetic inductive monitoring of trench depth201910,207,386Determination of gain for eddy current sensor20199,636,797'Adjusting eddy current measurements'20179,472,475'Feedback control using detection of clearance and adjustment for uniform topography'20169,281,253'Determination of gain for eddy current sensor'20169,275,917'Determination of gain for eddy current sensor'20169,205,527'In-situ monitoring system with monitoring of elongated region'20159,023,667'High sensitivity eddy current monitoring system'20159,005,999'Temperature control of chemical mechanical polishing'20158,694,144'Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2020Patents assigned to APPLIED MATERIALS INC (15)· patent assignee history
2014–2015Patents assigned to TU WEN-CHIANG (3)· patent assignee history
2014–2015Patents assigned to CARLSSON INGEMAR (2)· patent assignee history
2014–2015Patents assigned to JEW STEPHEN (2)· patent assignee history
2014–2015Patents assigned to MAI DAVID H (2)· patent assignee history
2014–2020Based in Sunnyvale, CA, US· patent location history
2015Based in Hsinchu, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 15 | 2014–2020 |
| TU WEN-CHIANG | 3 | 2014–2015 |
| CARLSSON INGEMAR | 2 | 2014–2015 |
| JEW STEPHEN | 2 | 2014–2015 |
| MAI DAVID H | 2 | 2014–2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 14 | 2014–2020 |
| Hsinchu, TW | 1 | 2015 |