Inventor
Nikolaus Maier
Inventor
Garching, DE
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
6,891,602'Device for aligning masks in photolithography'2005Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2005Patents assigned to SUESS MICRO TEC LITHOGRAPHY GM (1)· patent assignee history
2005Based in Garching, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SUESS MICRO TEC LITHOGRAPHY GM | 1 | 2005 |
Locations
| Location | Patents | Span |
|---|---|---|
| Garching, DE | 1 | 2005 |