Inventor
Paul B. Mirkarimi
Inventor
Sunol, CA, US
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices26%
G02BOptical elements, systems or apparatus21%
B82YSpecific uses or applications of nanostructures15%
C03CChemical composition of glasses, glazes or vitreous enamels10%
Y10TTechnical subjects covered by former us classification10%
C23CCoating metallic material5%
C23FNon-mechanical removal of metallic material from surface5%
G21KHandling of particles or ionising radiation not otherwise provided for5%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h103%
PatentTitleYear
10,901,121Planarization of optical substrates202110,175,391Planarization of optical substrates20197,049,033'EUV lithography reticles fabricated without the use of a patterned absorber'20067,022,435'Method for the manufacture of phase shifting masks for EUV lithography'20066,967,168'Method to repair localized amplitude defects in a EUV lithography mask blank'20056,821,682'Repair of localized defects in multilayer-coated reticle blanks for extreme ultraviolet lithography'20046,635,391'Method for fabricating reticles for EUV lithography without the use of a patterned absorber'20036,319,635'Mitigation of substrate defects in reticles using multilayer buffer layers'20016,309,705'Process for fabricating high reflectance-low stress Mo--Si multilayer reflective coatings'20016,134,049'Method to adjust multilayer film stress induced deformation of optics'20006,110,607'High reflectance-low stress Mo-Si multilayer reflective coatings'20006,011,646'Method to adjust multilayer film stress induced deformation of optics'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2003Patents assigned to UNIV CALIFORNIA (5)· patent assignee history
2000Patents assigned to UNVIERSITY OF CALIFORNIA (1)· patent assignee history
2000–2006Based in Sunol, CA, US· patent location history
2004–2006Patents assigned to EUV LLC (4)· patent assignee history
2019–2021Patents assigned to L LIVERMORE NAT SECURITY LLC (2)· patent assignee history
2019–2021Based in Danville, CA, US· patent location history
2021Patents assigned to UNIV COLORADO STATE RES FOUND (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| UNIV CALIFORNIA | 5 | 2000–2003 |
| EUV LLC | 4 | 2004–2006 |
| L LIVERMORE NAT SECURITY LLC | 2 | 2019–2021 |
| UNIV COLORADO STATE RES FOUND | 1 | 2021 |
| UNVIERSITY OF CALIFORNIA | 1 | 2000 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunol, California, US | 10 | 2000–2006 |
| Danville, California, US | 2 | 2019–2021 |