Inventor
Sanjay Lalbahadoersing
Inventor
Helmond, NL
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
7,619,738'Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus'20097,355,675'Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus'20087,330,261'Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008–2009Patents assigned to ASML NETHERLANDS BV (3)· patent assignee history
2008–2009Based in Helmond, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 3 | 2008–2009 |
Locations
| Location | Patents | Span |
|---|---|---|
| Helmond, NL | 3 | 2008–2009 |