Inventor
SCHUBERT S. CHU
Inventor
US
Overview
Patents· 20 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
C23CCoating metallic material13%
C30BSingle-crystal growth12%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light5%
H01JElectric discharge tubes or discharge lamps5%
B08BCleaning in general4%
B23KSoldering or unsoldering4%
B05CApparatus for applying fluent materials to surfaces, in general3%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems3%
PatentTitleYear
12,593,643Batch thermal process chamber202612,449,309Methods for detection using optical emission spectroscopy202512,400,904Thermal processing susceptor202512,196,617Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber202512,170,196Methods and systems for cleaning high aspect ratio structures202412,165,934Substrate processing monitoring202412,163,229Multi zone spot heating in EPI202412,125,698Integrated epitaxy and preclean system202412,037,701Multi-thermal CVD chambers with shared gas delivery and exhaust system202411,996,307Semiconductor processing tool platform configuration with reduced footprint202411,848,226Thermal processing susceptor202311,821,088Multi zone spot heating in EPI202311,815,401Temperature calibration with band gap absorption method202311,649,559Method of utilizing a degassing chamber to reduce arsenic outgassing following deposition of arsenic-containing material on a substrate202311,605,544Methods and systems for cleaning high aspect ratio structures202311,411,039Stacked pixel structure formed using epitaxy202211,359,972Temperature calibration with band gap absorption method202211,177,144Wafer spot heating with beam width modulation202111,164,767Integrated system for semiconductor process202111,164,737Integrated epitaxy and preclean system2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2026Patents assigned to APPLIED MATERIALS INC (20)· patent assignee history
2021–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 20 | 2021–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 20 | 2021–2026 |