Inventor
TAKEHARU MOTOKAWA
Inventor
JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
H01LSemiconductor devices19%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1019%
H01JElectric discharge tubes or discharge lamps13%
B29CShaping or joining of plastics6%
B29KIndexing scheme associated with subclasses b29b, b29c or b29d, relating to moulding materials or to materials for moulds, reinforcements, fillers or preformed parts, e.g. inserts6%
B29LIndexing scheme associated with subclass b29c, relating to particular articles6%
C23CCoating metallic material6%
PatentTitleYear
12,575,385Etching method, etching apparatus, manufacturing method of semiconductor device, and manufacturing method of template202612,573,596Plasma treatment apparatus, plasma treatment method, and original plate manufacturing method202611,931,923Method of manufacturing template and method of forming pattern202411,789,365Substrate processing method and substrate processing apparatus202311,493,846Pattern forming method and template manufacturing method2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to KIOXIA CORP (5)· patent assignee history
2022–2026Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KIOXIA CORP | 5 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 5 | 2022–2026 |