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Inventor

DAVID PALAGASHVILI

Inventor
US

Overview

2→
Patents
2022
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps40%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
H01LSemiconductor devices20%
PatentTitleYear
11,322,337Plasma processing system workpiece carrier with thermally isolated heater plate blocks202211,302,520Chamber apparatus for chemical etching of dielectric materials2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022Patents assigned to APPLIED MATERIALS INC (2)· patent assignee history
2022Based in US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
APPLIED MATERIALS INC22022
Locations
LocationPatentsSpan
US22022