Inventor
YUTAKA SHIRAISHI
Inventor
JP
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H05GX-ray technique33%
H01LSemiconductor devices13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
G01NInvestigating or analysing materials by determining their chemical or physical properties4%
G21KHandling of particles or ionising radiation not otherwise provided for4%
PatentTitleYear
12,207,382Target supply system, extreme ultraviolet light generation apparatus, and electronic device manufacturing method202512,185,449EUV light generation apparatus, electronic device manufacturing method, and inspection method202412,150,233Target substance replenishment device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method202411,474,433Extreme ultraviolet light generation apparatus and electronic device manufacturing method202211,363,706Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method202211,360,391Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method202211,320,740Target supply device, target supply method, and electronic device manufacturing method202211,310,899Target supply device, target supply method, and electronic device manufacturing method2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to GIGAPHOTON INC (8)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| GIGAPHOTON INC | 8 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 8 | 2022–2025 |