Inventor
FUJIHIKO TOYOMASU
Inventor
JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B08Bprimary
B08BCleaning in general24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
B24BMachines, devices, or processes for grinding or polishing16%
H01LSemiconductor devices12%
B01FMixing, e.g. dissolving, emulsifying or dispersing8%
G01FMeasuring volume, volume flow, mass flow or liquid level8%
G05DSystems for controlling or regulating non-electric variables8%
C11DDetergent compositions4%
PatentTitleYear
12,447,449Chemical supply apparatus, cleaning system, and chemical supply method202512,208,428Liquid supplying device and method for draining liquid thereof202512,140,980Apparatus for supplying liquid, cleaning unit, and apparatus for processing substrate202412,042,901Cleaning liquid supply device, cleaning unit, and storage medium storing program202411,890,652Cleaning chemical liquid supply device and cleaning chemical liquid supply method202411,358,253Cleaning liquid supply device, cleaning unit, and storage medium storing program2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to EBARA CORP (6)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EBARA CORP | 6 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 6 | 2022–2025 |