Inventor
HITOSHI MURATA
Inventor
JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
C23CCoating metallic material17%
G01KMeasuring temperature11%
F27BFurnaces, kilns, ovens or retorts in general6%
G05DSystems for controlling or regulating non-electric variables6%
H05BElectric heating6%
PatentTitleYear
12,504,332Substrate temperature sensor, substrate retainer and substrate processing apparatus202512,293,930Substrate processing apparatus, method of manufacturing semiconductor device and heater202512,241,159Substrate processing apparatus and ceiling heater202511,906,367Substrate temperature sensor, substrate retainer and substrate processing apparatus202411,359,285Substrate processing apparatus, heater and method of manufacturing semiconductor device2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to KOKUSAI ELECTRIC CORP (5)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KOKUSAI ELECTRIC CORP | 5 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 5 | 2022–2025 |