Inventor
Zongyu Li
Inventor
Sunnyvale, CA, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
H01JElectric discharge tubes or discharge lamps27%
H02NElectric machines not otherwise provided for13%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1013%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests13%
PatentTitleYear
6,689,249'Shield or ring surrounding semiconductor workpiece in plasma chamber'20046,284,149'High-density plasma etching of carbon-based low-k materials in a integrated circuit'20016,284,093'Shield or ring surrounding semiconductor workpiece in plasma chamber'20016,168,726'Etching an oxidized organo-silane film'20016,113,731'Magnetically-enhanced plasma chamber with non-uniform magnetic field'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2004Patents assigned to APPLIED MATERIALS INC (5)· patent assignee history
2000–2004Based in Sunnyvale, CA, US· patent location history
2001Based in Cupertino, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 5 | 2000–2004 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 3 | 2000–2004 |
| Cupertino, California, US | 2 | 2001 |