Inventor
Silvia De Dea
Inventor
San Diego, CA, US
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices31%
H05GX-ray technique20%
B08BCleaning in general11%
G02BOptical elements, systems or apparatus9%
B23KSoldering or unsoldering6%
C23CCoating metallic material6%
G01FMeasuring volume, volume flow, mass flow or liquid level6%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light6%
G21KHandling of particles or ionising radiation not otherwise provided for6%
PatentTitleYear
10,232,413Controlled fluid flow for cleaning an optical element201910,185,234Harsh environment optical element protection20199,844,804Light collector mirror carrier20179,776,218'Controlled fluid flow for cleaning an optical element'20179,632,418'Target material supply apparatus for an extreme ultraviolet light source'20179,557,650'Transport system for an extreme ultraviolet light source'20179,560,730'Transport system for an extreme ultraviolet light source'20179,392,678'Target material supply apparatus for an extreme ultraviolet light source'20169,073,098'Light collector mirror cleaning'20159,000,404'Systems and methods for optics cleaning in an EUV light source'20158,816,305'Filter for material supply apparatus'20148,633,459'Systems and methods for optics cleaning in an EUV light source'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2019Patents assigned to ASML NETHERLANDS BV (11)· patent assignee history
2014–2015Patents assigned to DE DEA SILVIA (3)· patent assignee history
2014–2015Patents assigned to Cymer LLC (2)· patent assignee history
2014–2015Patents assigned to ERSHOV ALEXANDER I (2)· patent assignee history
2014Patents assigned to BAUMGART PETER (1)· patent assignee history
2014–2019Based in San Diego, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 11 | 2014–2019 |
| DE DEA SILVIAself | 3 | 2014–2015 |
| Cymer LLC | 2 | 2014–2015 |
| ERSHOV ALEXANDER I | 2 | 2014–2015 |
| BAUMGART PETER | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Diego, California, US | 12 | 2014–2019 |