Inventor
Shuji Yonemitsu
Inventor
Tokyo, JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests38%
C23CCoating metallic material13%
C30BSingle-crystal growth13%
PatentTitleYear
6,143,083'Substrate transferring mechanism'20006,066,210'Substrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure section'20005,788,447'Substrate processing apparatus'19985,632,820'Thermal treatment furnace in a system for manufacturing semiconductors'1997Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1997–2000Patents assigned to KOKUSAI ELECTRIC CO LTD (4)· patent assignee history
1997–2000Based in Tokyo, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KOKUSAI ELECTRIC CO LTD | 4 | 1997–2000 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 4 | 1997–2000 |