Inventor
Timothy R. Groves
Inventor
Poughkeepsie, NY, US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps42%
B82YSpecific uses or applications of nanostructures27%
B41JTypewriters8%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices8%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests8%
G01BMeasuring length, thickness or similar linear dimensions4%
H05HPlasma technique4%
PatentTitleYear
7,053,388'Dual-mode electron beam lithography machine'20066,822,248'Spatial phase locking with shaped electron beam lithography'20046,369,396'Calibration target for electron beams'20026,296,976'Compensation of within-subfield linewidth variation in e-beam projection lithography'20016,175,122'Method for writing a pattern using multiple variable shaped electron beams'20015,981,962'Distributed direct write lithography system using multiple variable shaped electron beams'19995,962,859'Multiple variable shaped electron beam system with lithographic structure'19995,916,716'Emulation methodology for critical dimension control in E-Beam lithography'19995,756,234'High accuracy fabrication of X-ray masks with optical and E-beam lithography'19985,585,629'Electron beam nano-metrology system'19964,859,856'Telecentric sub-field deflection with vail'19894,737,644'Conductive coated semiconductor electrostatic deflection plates'19884,455,561'Electron beam driven ink jet printer'1984Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1984Patents assigned to HEWLETT PACKARD CO (1)· patent assignee history
1984Based in Palo Alto, CA, US· patent location history
1988–2004Patents assigned to IBM (10)· patent assignee history
1988–2002Based in Poughkeepsie, NY, US· patent location history
2001Patents assigned to NIKON CORP (1)· patent assignee history
2001–2004Based in Fulbourn, GB· patent location history
2006Patents assigned to LEICA MICROSYS LITHOGRAPHY LTD (1)· patent assignee history
2006Based in Cambridge, GB· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| IBM | 10 | 1988–2004 |
| HEWLETT PACKARD CO | 1 | 1984 |
| LEICA MICROSYS LITHOGRAPHY LTD | 1 | 2006 |
| NIKON CORP | 1 | 2001 |
Locations
| Location | Patents | Span |
|---|---|---|
| Poughkeepsie, New York, US | 9 | 1988–2002 |
| Fulbourn, GB | 2 | 2001–2004 |
| Cambridge, GB | 1 | 2006 |
| Palo Alto, California, US | 1 | 1984 |