Inventor
CHING-HAI YANG
Inventor
TW
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices20%
H01LSemiconductor devices20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
B05BSpraying apparatus8%
B05CApparatus for applying fluent materials to surfaces, in general8%
B05DProcesses for applying fluent materials to surfaces, in general8%
G01BMeasuring length, thickness or similar linear dimensions4%
G05BControl or regulating systems in general4%
G06TImage data processing or generation, in general4%
H04NPictorial communication, e.g. television4%
PatentTitleYear
12,400,866Method and system for manufacturing a semiconductor device202512,265,327Semiconductor manufacturing apparatus and method thereof202512,124,168Method and apparatus for coating photoresist over a substrate202411,806,743Spin dispenser module substrate surface protection system202311,344,910Spin dispenser module substrate surface protection system2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (5)· patent assignee history
2022–2025Based in TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 5 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 5 | 2022–2025 |