Inventor
Franciscus Andreas Cornelis Johannes Spanjers
Inventor
Oirschot, NL
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
B25JManipulators13%
H02NElectric machines not otherwise provided for13%
PatentTitleYear
7,486,384'Lithographic support structure'20097,295,283'Lithographic apparatus and device manufacturing method'20076,856,376'Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured thereby'20056,791,664'Lithographic apparatus, device manufacturing method, and device manufacturing thereby'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2009Patents assigned to ASML NETHERLANDS BV (4)· patent assignee history
2004–2009Based in Oirschot, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 4 | 2004–2009 |
Locations
| Location | Patents | Span |
|---|---|---|
| Oirschot, NL | 4 | 2004–2009 |