Inventor
Ravinder Aggarwal
Inventor
Gilbert, AZ, US
Overview
Patents· 45 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
C23CCoating metallic material18%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests11%
G01KMeasuring temperature10%
C30BSingle-crystal growth4%
F16KValves3%
H01JElectric discharge tubes or discharge lamps3%
H01LSemiconductor devices3%
A47CChairs1%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors1%
PatentTitleYear
11,031,043Video collaboration tool20219,551,069'Reaction apparatus having multiple adjustable exhaust ports'20179,297,705'Smart temperature measuring device'20169,267,850'Thermocouple assembly with guarded thermocouple junction'20168,927,435'Load lock having secondary isolation chamber'20158,801,857'Self-centering susceptor ring assembly'20148,616,765'Thermocouple'20138,486,191'Substrate reactor with adjustable injectors for mixing gases within reaction chamber'20138,440,048'Load lock having secondary isolation chamber'20138,394,229'Susceptor ring'20138,382,370'Thermocouple assembly with guarded thermocouple junction'20138,262,287'Thermocouple'20128,100,583'Thermocouple'20128,088,225'Substrate support system for reduced autodoping and backside deposition'20128,067,061'Reaction apparatus having multiple adjustable exhaust ports'20118,047,706'Calibration of temperature control system for semiconductor processing chamber'20117,993,057'Redundant temperature sensor for semiconductor processing chambers'20117,725,012'Movable radiant heat sources'20107,648,579'Substrate support system for reduced autodoping and backside deposition'2010D0600223'Susceptor ring'20097,585,142'Substrate handling chamber with movable substrate carrier loading platform'20097,449,071'Wafer holder with peripheral lift ring'20087,231,141'High temperature drop-off of a substrate'20077,159,846'Slit valve for a semiconductor processing system'20077,147,720'Non-contact cool-down station for wafers'20067,018,504'Loadlock with integrated pre-clean chamber'20066,899,145'Front opening unified pod'20056,883,250'Non-contact cool-down station for wafers'20056,883,776'Slit valve for a semiconductor processing system'20056,879,777'Localized heating of substrates using optics'20056,776,849'Wafer holder with peripheral lift ring'20046,704,496'High temperature drop-off of a substrate'20046,696,367'System for the improved handling of wafers within a process tool'20046,609,869'Transfer chamber with integral loadlock and staging station'20036,592,318'Docking cart with integrated load port'20036,550,158'Substrate handling chamber'20036,521,503'High temperature drop-off of a substrate'20036,465,761'Heat lamps for zone heating'20026,318,957'Method for handling of wafers with minimal contact'20016,242,718'Wafer holder'20016,162,006'Stackable cassette for use with wafer cassettes'20006,158,951'Wafer carrier and method for handling of wafers with minimal contact'20006,042,324'Multi-stage single-drive FOUP door system'20005,091,217'Method for processing wafers in a multi station common chamber reactor'19924,987,856'High throughput multi station processor for multiple single wafers'1991Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1991–1992Based in Mesa, AZ, US· patent location history
2000–2017Patents assigned to ASM INC (40)· patent assignee history
2000–2017Based in Gilbert, AZ, US· patent location history
2009–2017Patents assigned to AGGARWAL RAVINDER (10)· patent assignee history
2012–2016Patents assigned to AGGARWAL RAVINDER K (3)· patent assignee history
2012–2016Patents assigned to CONNER RAND (3)· patent assignee history
2012–2013Patents assigned to HALPIN MIKE (3)· patent assignee history
2021Based in San Francisco, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASM INC | 40 | 2000–2017 |
| AGGARWAL RAVINDERself | 10 | 2009–2017 |
| AGGARWAL RAVINDER Kself | 3 | 2012–2016 |
| CONNER RAND | 3 | 2012–2016 |
| HALPIN MIKE | 3 | 2012–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Gilbert, AZ, US | 42 | 2000–2017 |
| Mesa, AZ, US | 2 | 1991–1992 |
| San Francisco, California, US | 1 | 2021 |