Inventor
SENA FUJITA
Inventor
JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material26%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
H01LSemiconductor devices21%
B08BCleaning in general11%
H01JElectric discharge tubes or discharge lamps11%
C30BSingle-crystal growth5%
PatentTitleYear
12,545,994Film forming method and film forming apparatus202612,252,786Cleaning method and substrate processing apparatus202511,915,914Film forming method and film forming apparatus202411,410,847Film forming method and film forming apparatus202211,260,433Cleaning method of substrate processing apparatus and substrate processing apparatus2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
2022–2026Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 5 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 5 | 2022–2026 |