Inventor
Ing-Yann Albert Wang
Inventor
Moraga, CA, US
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps32%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1016%
C23CCoating metallic material12%
C23FNon-mechanical removal of metallic material from surface12%
H05HPlasma technique12%
C03CChemical composition of glasses, glazes or vitreous enamels8%
Y10TTechnical subjects covered by former us classification8%
PatentTitleYear
8,425,682'High strip rate downstream chamber'20138,298,336'High strip rate downstream chamber'20128,048,329'Methods for implementing highly efficient plasma traps'20117,824,519'Variable volume plasma processing chamber and associated methods'20107,679,024'Highly efficient gas distribution arrangement for plasma tube of a plasma processing chamber'20107,562,638'Methods and arrangement for implementing highly efficient plasma traps'20097,554,053'Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system'20097,476,291'High chamber temperature process and chamber design for photo-resist stripping and post-metal etch passivation'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2013Patents assigned to LAM RES CORP (8)· patent assignee history
2009–2013Based in Moraga, CA, US· patent location history
2012Patents assigned to CHEBI ROBERT P (1)· patent assignee history
2012Patents assigned to COOPERBERG DAVID J (1)· patent assignee history
2012Patents assigned to EDELBERG ERIK A (1)· patent assignee history
2012Patents assigned to WANG ING-YANN (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 8 | 2009–2013 |
| CHEBI ROBERT P | 1 | 2012 |
| COOPERBERG DAVID J | 1 | 2012 |
| EDELBERG ERIK A | 1 | 2012 |
| WANG ING-YANNself | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Moraga, California, US | 8 | 2009–2013 |