Inventor
Tadashi Kotsugi
Inventor
Miyagi, JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps23%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
B82YSpecific uses or applications of nanostructures17%
H01LSemiconductor devices13%
Y10TTechnical subjects covered by former us classification10%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices7%
H05HPlasma technique3%
H10NElectric solid-state devices not otherwise provided for3%
PatentTitleYear
9,691,643'Etching apparatus'20179,245,764'Semiconductor device manufacturing method'20168,993,352'Plasma processing method and plasma processing apparatus'20158,877,081'Etching method and etching apparatus'20147,554,095'Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate'20097,550,739'Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate'20097,521,687'Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2017Patents assigned to TOKYO ELECTRON LTD (7)· patent assignee history
2009Based in Tokyo, JP· patent location history
2009Based in Minato-ku, JP· patent location history
2014–2017Based in Miyagi, JP· patent location history
2015Based in Beaverton, OR, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 7 | 2009–2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Miyagi, JP | 3 | 2014–2017 |
| Tokyo, JP | 2 | 2009 |
| Beaverton, OR, US | 1 | 2015 |
| Minato-ku, JP | 1 | 2009 |