Inventor
Atsuhiko Tabuchi
Inventor
Miyagi, JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
H01LSemiconductor devices25%
G05DSystems for controlling or regulating non-electric variables17%
F28FDetails of heat-exchange and heat-transfer apparatus, of general application8%
H01JElectric discharge tubes or discharge lamps8%
Y10TTechnical subjects covered by former us classification8%
PatentTitleYear
10,553,463Temperature control system, semiconductor manufacturing device, and temperature control method20209,984,908Temperature control system, semiconductor manufacturing device, and temperature control method20189,664,460'Method of supplying temperature control fluid to temperature control system and storage medium'20178,809,197'Plasma etching apparatus and control method'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2020Patents assigned to TOKYO ELECTRON LTD (4)· patent assignee history
2014–2020Based in Miyagi, JP· patent location history
2018–2020Patents assigned to CKD CORP (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 4 | 2014–2020 |
| CKD CORP | 2 | 2018–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Miyagi, JP | 4 | 2014–2020 |