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Inventor

SATORU TERUUCHI

Inventor
JP

Overview

3→
Patents
2022–2025
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps21%
H01LSemiconductor devices21%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
C23CCoating metallic material7%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light7%
G01NInvestigating or analysing materials by determining their chemical or physical properties7%
H05BElectric heating7%
H05HPlasma technique7%
PatentTitleYear
12,424,424Plasma monitoring system, plasma monitoring method, and monitoring device202512,142,501Substrate processing system and temperature control method202411,373,884Placing table and plasma treatment apparatus2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2025Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2022–2025Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD32022–2025
Locations
LocationPatentsSpan
JP32022–2025