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Inventor

Kaoru Shinbara

Inventor
Shiga, JP

Overview

6→
Patents
1988–2001
Patent span
Electricity
Primary field (CPC H)

Patents· 6 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1035%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests29%
B08BCleaning in general24%
B05CApparatus for applying fluent materials to surfaces, in general6%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices6%
PatentTitleYear
6,273,104'Method of and apparatus for processing substrate'20016,155,275'Substrate processing unit and substrate processing apparatus using the same'20005,485,644'Substrate treating apparatus'19965,288,333'Wafer cleaning method and apparatus therefore'19945,158,100'Wafer cleaning method and apparatus therefor'19924,788,994'Wafer holding mechanism'1988

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1988–2001Patents assigned to DAINIPPON SCREEN MFG (6)· patent assignee history
1988Based in Kusatsu, JP· patent location history
1992–1994Based in Hikone, JP· patent location history
1996–2001Based in Shiga, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
DAINIPPON SCREEN MFG61988–2001
Locations
LocationPatentsSpan
Shiga, JP31996–2001
Hikone, JP21992–1994
Kusatsu, JP11988