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Inventor

IN CHAN BECK

Inventor
KR

Overview

1→
Patents
2024
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G01Rprimary
G01RMeasuring electric variables25%
H01LSemiconductor devices25%
H05BElectric heating25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
12,106,979Apparatus and method for controlling temperature uniformity of substrate2024

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2024Patents assigned to UNIV INDUSTRY COOPERATION GROUP KYUNG HEE UNIV (1)· patent assignee history
2024Based in KR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
UNIV INDUSTRY COOPERATION GROUP KYUNG HEE UNIV12024
Locations
LocationPatentsSpan
KR12024