Inventor
Michiel David Nijkerk
Inventor
Amsterdam, NL
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
G02BOptical elements, systems or apparatus17%
G21KHandling of particles or ionising radiation not otherwise provided for17%
B82YSpecific uses or applications of nanostructures11%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light6%
G01NInvestigating or analysing materials by determining their chemical or physical properties6%
H01JElectric discharge tubes or discharge lamps6%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h106%
PatentTitleYear
9,383,490'Depolarizer, telescope and remote sensing device and method'20169,304,300'Anamorphotic telescope'20168,559,108'Grating for EUV-radiation, method for manufacturing the grating and wavefront measurement system'20138,164,077'Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element'20127,732,762'Method of inspecting a specimen surface, apparatus and use of fluorescent material'20107,646,004'Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element'20107,491,951'Lithographic apparatus, system and device manufacturing method'20097,390,614'Lithographic apparatus and device manufacturing method'20087,379,153'Lithographic apparatus and device manufacturing method'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008–2013Patents assigned to ASML NETHERLANDS BV (4)· patent assignee history
2008–2013Based in Amsterdam, NL· patent location history
2009–2010Patents assigned to ZEISS CARL SMT AG (2)· patent assignee history
2010–2016Patents assigned to TNO (3)· patent assignee history
2012–2016Patents assigned to NIJKERK MICHIEL DAVID (3)· patent assignee history
2013–2016Patents assigned to KRUIZINGA BORGERT (2)· patent assignee history
2016Based in Delft, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 4 | 2008–2013 |
| NIJKERK MICHIEL DAVIDself | 3 | 2012–2016 |
| TNO | 3 | 2010–2016 |
| KRUIZINGA BORGERT | 2 | 2013–2016 |
| ZEISS CARL SMT AG | 2 | 2009–2010 |
Locations
| Location | Patents | Span |
|---|---|---|
| Amsterdam, NL | 7 | 2008–2013 |
| Delft, NL | 2 | 2016 |