Inventor
Hideyoshi Tsuruta
Inventor
Tokai, JP
Overview
Patents· 29 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
H05BElectric heating13%
Y10TTechnical subjects covered by former us classification11%
C04BLime, magnesia7%
C23CCoating metallic material7%
B29CShaping or joining of plastics3%
F27BFurnaces, kilns, ovens or retorts in general3%
F27DDetails or accessories of furnaces, kilns, ovens or retorts, in so far as they are of kinds occurring in more than one kind of furnace3%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices3%
H01JElectric discharge tubes or discharge lamps3%
PatentTitleYear
10,037,910Wafer holder and method for manufacturing the same20187,763,831'Heating device'20107,679,034'Power-supplying member and heating apparatus using the same'20107,582,184'Plasma processing member'20097,576,967'Electrostatic chuck'20097,525,071'Power-supplying member and heating apparatus using the same'20097,403,386'Electrostatic chuck'20087,247,818'Substrate heating apparatus and manufacturing method for the same'20077,247,819'Substrate heating apparatus'20077,220,320'Systems for producing semiconductors and members therefor'20077,189,946'Substrate heating device'20077,157,666'Systems for producing semiconductors and members therefor'20077,126,093'Heating systems'20067,067,200'Joined bodies and a method of producing the same'20067,060,945'Substrate heater and fabrication method for the same'20067,044,399'Heating systems'20067,042,697'Electrostatic chucks and electrostatically attracting structures'20067,022,947'Systems for supporting ceramic susceptors'20066,800,576'Aluminum nitride sintered bodies and members for semiconductor-producing apparatuses'20046,785,115'Electrostatic chuck and substrate processing apparatus'20046,728,091'Electrostatic adsorption device'20046,636,413'Electrostatic chucks and process for producing the same'20036,617,514'Ceramics joint structure and method of producing the same'20036,608,745'Electrostatic chunks'20036,225,606'Ceramic heater'20016,057,513'Joint structure of metal member and ceramic member and method of producing the same'20005,995,357'Ceramic member-electric power supply connector coupling structure'19995,817,406'Ceramic susceptor with embedded metal electrode and brazing material connection'19985,794,838'Ceramics joined body and method of joining ceramics'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2018Patents assigned to NGK INSULATORS LTD (28)· patent assignee history
1998Patents assigned to APPLIED MATERIALS INC (1)· patent assignee history
1998–2004Based in Nagoya, JP· patent location history
1999–2018Based in Tokai, JP· patent location history
2004Patents assigned to ANELVA CORP (1)· patent assignee history
2004–2006Based in Toukai, JP· patent location history
2006Based in Tohkai, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NGK INSULATORS LTD | 28 | 1998–2018 |
| ANELVA CORP | 1 | 2004 |
| APPLIED MATERIALS INC | 1 | 1998 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokai, JP | 22 | 1999–2018 |
| Nagoya, JP | 4 | 1998–2004 |
| Toukai, JP | 2 | 2004–2006 |
| Tohkai, JP | 1 | 2006 |