Inventor
Seiji Kozawa
Inventor
Kumamoto, JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices20%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests20%
B65HHandling thin or filamentary material, e.g. sheets, webs, cables10%
G05BControl or regulating systems in general10%
PatentTitleYear
8,812,266'Abnormality determination system and abnormality determination method for processing apparatus'20146,814,809'Coating and developing apparatus and pattern forming method'20046,643,564'Method of determining retreat permission position of carrier arm and teaching device thereof'20036,332,751'Transfer device centering method and substrate processing apparatus'20016,050,389'Carrier apparatus with more than one carrier belts and processing apparatus therewith'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2014Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
2000–2003Based in Kumamoto, JP· patent location history
2001Based in Uto, JP· patent location history
2004Based in Suwa, JP· patent location history
2014Patents assigned to ASAI RYUJI (1)· patent assignee history
2014Patents assigned to KOZAWA SEIJI (1)· patent assignee history
2014Patents assigned to NAGANO TOSHIHIKO (1)· patent assignee history
2014Patents assigned to NAKAMURA NAOTO (1)· patent assignee history
2014Based in Koshi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 5 | 2000–2014 |
| ASAI RYUJI | 1 | 2014 |
| KOZAWA SEIJIself | 1 | 2014 |
| NAGANO TOSHIHIKO | 1 | 2014 |
| NAKAMURA NAOTO | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kumamoto, JP | 2 | 2000–2003 |
| Koshi, JP | 1 | 2014 |
| Suwa, JP | 1 | 2004 |
| Uto, JP | 1 | 2001 |