Inventor
TENSEI SATO
Inventor
JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C25Dprimary
C25DProcesses for the electrolytic or electrophoretic production of coatings27%
G05BControl or regulating systems in general20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
H01LSemiconductor devices13%
Y02PClimate change mitigation technologies in the production or processing of goods13%
G01RMeasuring electric variables7%
PatentTitleYear
12,191,178Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatus202511,866,842Short circuit detection method in plating apparatus, control method of plating apparatus, and plating apparatus202411,661,669Substrate processing system, controller and method using test operation without substrate202311,315,812Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatus2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to EBARA CORP (4)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EBARA CORP | 4 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 4 | 2022–2025 |