Inventor
Shizuo Ogawa
Inventor
Kumamoto, JP
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
B05CApparatus for applying fluent materials to surfaces, in general17%
PatentTitleYear
6,673,155'Apparatus for forming coating film and apparatus for curing the coating film'20045,980,591'System for processing a plurality of objects contained in a plurality of cassettes'19995,803,932'Resist processing apparatus having an interface section including two stacked substrate waiting tables'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2004Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
1998Patents assigned to TEL KYUSHU KK (1)· patent assignee history
1998–2004Based in Kumamoto, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 3 | 1998–2004 |
| TEL KYUSHU KK | 1 | 1998 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kumamoto, JP | 3 | 1998–2004 |