Inventor
John F. Baggett
Inventor
Amesbury, MA, US
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
H01JElectric discharge tubes or discharge lamps24%
G01BMeasuring length, thickness or similar linear dimensions7%
G01KMeasuring temperature7%
C23CCoating metallic material3%
G01NInvestigating or analysing materials by determining their chemical or physical properties3%
PatentTitleYear
11,011,397Wafer soak temperature readback and control via thermocouple embedded end effector for semiconductor processing equipment202110,903,097In-situ wafer temperature measurement and control202110,861,731Radiant heating presoak202010,794,694Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner sensor for semiconductor manufacturing equipment202010,714,317Reduction of condensed gases on chamber walls via heated chamber housing for semiconductor processing equipment202010,679,818Low conductance self-shielding insulator for ion implantation systems202010,227,693Outgassing impact on process chamber reduction via chamber pump and purge201910,128,084Wafer temperature control with consideration to beam power input201810,074,508Low conductance self-shielding insulator for ion implantation systems201810,041,789Integrated emissivity sensor alignment characterization20189,502,207'Cam actuated filament clamp'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2021Patents assigned to AXCELIS TECH INC (11)· patent assignee history
2016–2021Based in Amesbury, MA, US· patent location history
2021Based in Georgetown, MA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| AXCELIS TECH INC | 11 | 2016–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Amesbury, Massachusetts, US | 10 | 2016–2021 |
| Georgetown, Massachusetts, US | 1 | 2021 |