Inventor
Tamotsu Morimoto
Inventor
Nirasaki, JP
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps18%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1016%
H01LSemiconductor devices11%
H05KPrinted circuits8%
B32BLayered products, i.e. products built-up of strata of flat or non-flat, e.g. cellular or honeycomb, form5%
G02BOptical elements, systems or apparatus5%
G09FDisplaying5%
H10BElectronic memory devices5%
H10DInorganic electric semiconductor devices5%
H10NElectric solid-state devices not otherwise provided for5%
PatentTitleYear
10,790,152Method for etching multilayer film20209,947,864Method for etching object to be processed20189,911,596'Modification processing method and method of manufacturing semiconductor device'20189,443,724'Modification processing method and method of manufacturing semiconductor device'20169,025,248'Antireflection stack'20158,574,446'Apparatus and method for plasma processing'20138,040,062'Electroconductive laminate, and electromagnetic wave shielding film and protective plate for plasma display'20117,771,850'Electromagnetic wave shielding laminate and display device employing it'20107,740,946'Electroconductive laminate, and electromagnetic wave shielding film for plasma display and protective plate for plasma display'20106,812,151'Method of etching'20046,793,834'Apparatus for and method of processing an object to be processed'20046,514,377'Apparatus for and method of processing an object to be processed'20036,322,662'Plasma treatment system'20015,567,152'Heat processing apparatus'1996Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1996–2020Patents assigned to TOKYO ELECTRON LTD (10)· patent assignee history
1996–2020Based in Yamanashi, JP· patent location history
2001Patents assigned to ANDO MAKOTO (1)· patent assignee history
2001Patents assigned to GOTO NAOHISA (1)· patent assignee history
2003–2018Based in Nirasaki, JP· patent location history
2004Patents assigned to KENICHI NANBU (1)· patent assignee history
2010–2015Patents assigned to ASAHI GLASS CO LTD (4)· patent assignee history
2010–2011Based in Ichihara, JP· patent location history
2010Based in Chiba, JP· patent location history
2015Based in Chiyoda-ku, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 10 | 1996–2020 |
| ASAHI GLASS CO LTD | 4 | 2010–2015 |
| ANDO MAKOTO | 1 | 2001 |
| GOTO NAOHISA | 1 | 2001 |
| KENICHI NANBU | 1 | 2004 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nirasaki, JP | 5 | 2003–2018 |
| Yamanashi, JP | 4 | 1996–2020 |
| Ichihara, JP | 2 | 2010–2011 |
| Chiyoda-ku, JP | 1 | 2015 |
| Chiba, JP | 1 | 2010 |